Instituto Nacional de Engenharia de Superfícies

Artigos e Patentes

Tag "hysteresis"

  • 2009

  • T. Weber, R. L. O. Basso, G. V. Soares, I. J. R. Baumvol, M. A. Z. Vasconcellos and C. Krug. Hysteresis effect and film characterization in DC reactive sputteringof titania and alumina. 11th International Conference on Advanced Materials.

    Abstract:

    In preparation to the fabrication of TiO2/Al2O3 nanolaminates, titania and alumina thin films were deposited on Si single crystals using DC reactive sputtering. Optimal reactive gas flow was determined from a hysteresis loop obtained with simultaneous operation of Ti and Al targets. Film stoichiometry, deposition rate, phase composition and nanohardness were determined. Results indicate that thermal treatment might be necessary to achieve ultrahardness in nanolaminates fabricated under the conditions studied. / Ver detalhes

  • T. Weber, R. L. O. Basso, G. V. Soares, I. J. R. Baumvol, M. A. Z. Vasconcellos and C. Krug. Hysteresis effect and film characterization in DC reactive sputteringof titania and alumina. 11th International Conference on Advanced Materials.

    Abstract:

    In preparation to the fabrication of TiO2/Al2O3 nanolaminates, titania and alumina thin films were deposited on Si single crystals using DC reactive sputtering. Optimal reactive gas flow was determined from a hysteresis loop obtained with simultaneous operation of Ti and Al targets. Film stoichiometry, deposition rate, phase composition and nanohardness were determined. Results indicate that thermal treatment might be necessary to achieve ultrahardness in nanolaminates fabricated under the conditions studied. / Ver detalhes

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O Instituto Nacional de Engenharia de Superfícies, um dos INCTs do CNPq, reúne e articula em nível nacional os melhores recursos humanos e de infraestrutura em engenharia de superfícies. O instituto propõe uma estreita colaboração entre grupos de pesquisa e sistemas produtivos a serviço do crescimento sustentável do Brasil pela via da inovação tecnológica.

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